Imaging methods based on scanning a focused primary ion beam are associated with demanding focusing of the heavy energetic ions. As an alternative, stigmatic imaging mode has been studied here, applying point-to-point imaging characteristics of secondary ions in the linear Time-Of-Flight mass spectrometer. In stigmatic imaging approaches, spatial resolution is independent of the focussed spot size of the ionising primary ion beam, but instead dependant on the ability of the ion optics to project an image of the ion distributions removed from the surface onto a position sensitive ion detector.
|Number of pages||6|
|Journal||Nuclear Instruments & Methods in Physics Research Section B-Beam Interactions with Materials and Atoms|
|Publication status||Published - 1 Aug 2019|
- Stigmatic imaging