Gas Damping in Capacitive MEMS Transducers in the Free Molecular Flow Regime

B.A. Boom*, A. Bertolini, E. Hennes, J.F.J. van den Brand

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

1 Citation (Web of Science)

Abstract

We present a novel analysis of gas damping in capacitive MEMS transducers that is based on a simple analytical model, assisted by Monte-Carlo simulations performed in Molflow+ to obtain an estimate for the geometry dependent gas diffusion time. This combination provides results with minimal computational expense and through freely available software, as well as insight into how the gas damping depends on the transducer geometry in the molecular flow regime. The results can be used to predict damping for arbitrary gas mixtures. The analysis was verified by experimental results for both air and helium atmospheres and matches these data to within 15% over a wide range of pressures.
Original languageEnglish
Article number2566
Number of pages13
JournalSensors
Volume21
Issue number7
DOIs
Publication statusPublished - 1 Apr 2021

Keywords

  • capacitance transducers
  • free molecular flow
  • gas damping
  • Monte Carlo methods
  • Q measurement

Cite this