ToF-SIMS spectra of typical substrates in both polarities: Si wafer, Au-coated glass, and ITO-coated glass

ToF-SIMS is a surface analysis technique, and as a result, many samples need to be spotted or mounted onto a suitable substrate. Different substrates can be used for ToF-SIMS analysis, and it is essential to properly assign the characteristic chemical signals from the substrate to distinguish them from the sample analyte ions. Here, the authors provide a reference database that provides ToF-SIMS spectra for three widely used substrates in positive and negative polarities. The six spectra were acquired using a 30 keV Bi₃⁺ primary ion beam, with Ar gas cluster ion beam sputter cleaning of the surfaces before analysis.