Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing

Thijs Vandenryt; Lars Grieten; Stoffel D. Janssens; Bart van Grinsven; Ken Haenen; Bart Ruttens; Jan D'Haen; Patrick Wagner; Ronald Thoelen; Ward De Ceuninck

doi:10.1002/pssa.201330665

Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing

Thijs Vandenryt, Lars Grieten, Stoffel D. Janssens, Bart van Grinsven, Ken Haenen, Bart Ruttens, Jan D'Haen, Patrick Wagner, Ronald Thoelen, Ward De Ceuninck^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

Original language	English
Pages (from-to)	1448-1454
Number of pages	7
Journal	Physica Status Solidi A-applications and Materials Science
Volume	211
Issue number	6
DOIs	https://doi.org/10.1002/pssa.201330665
Publication status	Published - Jun 2014
Externally published	Yes

Keywords

chemical vapor deposition
electron-beam lithography
micro- and nanowires
microfluidics
PDMS
soft lithography
synthetic diamond
NANOCRYSTALLINE DIAMOND
DNA
LITHOGRAPHY
GROWTH
FILMS

Cite this

Vandenryt, T., Grieten, L., Janssens, S. D., van Grinsven, B., Haenen, K., Ruttens, B., D'Haen, J., Wagner, P., Thoelen, R., & De Ceuninck, W. (2014). Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing. Physica Status Solidi A-applications and Materials Science, 211(6), 1448-1454. https://doi.org/10.1002/pssa.201330665

Vandenryt, Thijs ; Grieten, Lars ; Janssens, Stoffel D. ; van Grinsven, Bart ; Haenen, Ken ; Ruttens, Bart ; D'Haen, Jan ; Wagner, Patrick ; Thoelen, Ronald ; De Ceuninck, Ward. / Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing. In: Physica Status Solidi A-applications and Materials Science. 2014 ; Vol. 211, No. 6. pp. 1448-1454.

@article{323ebba72a334952957b13f04733de33,

title = "Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing",

keywords = "chemical vapor deposition, electron-beam lithography, micro- and nanowires, microfluidics, PDMS, soft lithography, synthetic diamond, NANOCRYSTALLINE DIAMOND, DNA, LITHOGRAPHY, GROWTH, FILMS",

author = "Thijs Vandenryt and Lars Grieten and Janssens, {Stoffel D.} and {van Grinsven}, Bart and Ken Haenen and Bart Ruttens and Jan D'Haen and Patrick Wagner and Ronald Thoelen and {De Ceuninck}, Ward",

year = "2014",

month = jun

doi = "10.1002/pssa.201330665",

language = "English",

volume = "211",

pages = "1448--1454",

journal = "Physica Status Solidi A-applications and Materials Science",

issn = "1862-6300",

publisher = "Wiley-VCH Verlag",

number = "6",

}

Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing. / Vandenryt, Thijs; Grieten, Lars; Janssens, Stoffel D.; van Grinsven, Bart; Haenen, Ken; Ruttens, Bart; D'Haen, Jan; Wagner, Patrick; Thoelen, Ronald; De Ceuninck, Ward.

In: Physica Status Solidi A-applications and Materials Science, Vol. 211, No. 6, 06.2014, p. 1448-1454.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing

AU - Vandenryt, Thijs

AU - Grieten, Lars

AU - Janssens, Stoffel D.

AU - van Grinsven, Bart

AU - Haenen, Ken

AU - Ruttens, Bart

AU - D'Haen, Jan

AU - Wagner, Patrick

AU - Thoelen, Ronald

AU - De Ceuninck, Ward

PY - 2014/6

Y1 - 2014/6

KW - chemical vapor deposition

KW - electron-beam lithography

KW - micro- and nanowires

KW - microfluidics

KW - PDMS

KW - soft lithography

KW - synthetic diamond

KW - NANOCRYSTALLINE DIAMOND

KW - DNA

KW - LITHOGRAPHY

KW - GROWTH

KW - FILMS

U2 - 10.1002/pssa.201330665

DO - 10.1002/pssa.201330665

M3 - Article

VL - 211

SP - 1448

EP - 1454

JO - Physica Status Solidi A-applications and Materials Science

JF - Physica Status Solidi A-applications and Materials Science

SN - 1862-6300

IS - 6

ER -

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10.1002/pssa.201330665