Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing

Thijs Vandenryt; Lars Grieten; Stoffel D. Janssens; Bart van Grinsven; Ken Haenen; Bart Ruttens; Jan D'Haen; Patrick Wagner; Ronald Thoelen; Ward De Ceuninck

doi:10.1002/pssa.201330665

Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing

Thijs Vandenryt, Lars Grieten, Stoffel D. Janssens, Bart van Grinsven, Ken Haenen, Bart Ruttens, Jan D'Haen, Patrick Wagner, Ronald Thoelen, Ward De Ceuninck^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Academic › peer-review

Original language	English
Pages (from-to)	1448-1454
Number of pages	7
Journal	Physica Status Solidi A-applications and Materials Science
Volume	211
Issue number	6
DOIs	https://doi.org/10.1002/pssa.201330665
Publication status	Published - Jun 2014
Externally published	Yes

Keywords

chemical vapor deposition
electron-beam lithography
micro- and nanowires
microfluidics
PDMS
soft lithography
synthetic diamond
NANOCRYSTALLINE DIAMOND
DNA
LITHOGRAPHY
GROWTH
FILMS

Access to Document

10.1002/pssa.201330665

Cite this

Vandenryt, Thijs ; Grieten, Lars ; Janssens, Stoffel D. ; van Grinsven, Bart ; Haenen, Ken ; Ruttens, Bart ; D'Haen, Jan ; Wagner, Patrick ; Thoelen, Ronald ; De Ceuninck, Ward. / Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing. In: Physica Status Solidi A-applications and Materials Science. 2014 ; Vol. 211, No. 6. pp. 1448-1454.

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title = "Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing",

keywords = "chemical vapor deposition, electron-beam lithography, micro- and nanowires, microfluidics, PDMS, soft lithography, synthetic diamond, NANOCRYSTALLINE DIAMOND, DNA, LITHOGRAPHY, GROWTH, FILMS",

author = "Thijs Vandenryt and Lars Grieten and Janssens, {Stoffel D.} and {van Grinsven}, Bart and Ken Haenen and Bart Ruttens and Jan D'Haen and Patrick Wagner and Ronald Thoelen and {De Ceuninck}, Ward",

year = "2014",

month = jun,

doi = "10.1002/pssa.201330665",

language = "English",

volume = "211",

pages = "1448--1454",

journal = "Physica Status Solidi A-applications and Materials Science",

issn = "1862-6300",

publisher = "Wiley-VCH Verlag",

number = "6",

}

Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing. / Vandenryt, Thijs; Grieten, Lars; Janssens, Stoffel D.; van Grinsven, Bart; Haenen, Ken; Ruttens, Bart; D'Haen, Jan; Wagner, Patrick; Thoelen, Ronald; De Ceuninck, Ward.

In: Physica Status Solidi A-applications and Materials Science, Vol. 211, No. 6, 06.2014, p. 1448-1454.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing

AU - Vandenryt, Thijs

AU - Grieten, Lars

AU - Janssens, Stoffel D.

AU - van Grinsven, Bart

AU - Haenen, Ken

AU - Ruttens, Bart

AU - D'Haen, Jan

AU - Wagner, Patrick

AU - Thoelen, Ronald

AU - De Ceuninck, Ward

PY - 2014/6

Y1 - 2014/6

KW - chemical vapor deposition

KW - electron-beam lithography

KW - micro- and nanowires

KW - microfluidics

KW - PDMS

KW - soft lithography

KW - synthetic diamond

KW - NANOCRYSTALLINE DIAMOND

KW - DNA

KW - LITHOGRAPHY

KW - GROWTH

KW - FILMS

U2 - 10.1002/pssa.201330665

DO - 10.1002/pssa.201330665

M3 - Article

VL - 211

SP - 1448

EP - 1454

JO - Physica Status Solidi A-applications and Materials Science

JF - Physica Status Solidi A-applications and Materials Science

SN - 1862-6300

IS - 6

ER -