Rapid fabrication of micron-sized CVD-diamond structures by microfluidic contact printing

Thijs Vandenryt, Lars Grieten, Stoffel D. Janssens, Bart van Grinsven, Ken Haenen, Bart Ruttens, Jan D'Haen, Patrick Wagner, Ronald Thoelen, Ward De Ceuninck*

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

Original languageEnglish
Pages (from-to)1448-1454
Number of pages7
JournalPhysica Status Solidi A-applications and Materials Science
Volume211
Issue number6
DOIs
Publication statusPublished - Jun 2014
Externally publishedYes

Keywords

  • chemical vapor deposition
  • electron-beam lithography
  • micro- and nanowires
  • microfluidics
  • PDMS
  • soft lithography
  • synthetic diamond
  • NANOCRYSTALLINE DIAMOND
  • DNA
  • LITHOGRAPHY
  • GROWTH
  • FILMS

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