Mid-infrared supercontinuum-based Fourier transform spectroscopy for plasma analysis

R. Krebbers, N. Liu, K.E. Jahromi, M. Nematollahi, O. Bang, G. Woyessa, C.R. Petersen, G. van Rooij, F.J.M. Harren, A. Khodabakhsh*, S.M. Cristescu

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

Abstract

Broadband mid-infrared (MIR) spectroscopy is a well-established and valuable diagnostic technique for reactive plasmas. Plasmas are complex systems and consist of numerous (reactive) types of molecules; it is challenging to measure and control reaction specificity with a good sensitivity. Here, we demonstrate the first use of a novel MIR supercontinuum (SC) source for quantitative plasma spectroscopy. The SC source has a wide spectral coverage of 1300-2700 cm(-1) (wavelength range 3.7-7.7 mu m), thus enabling broadband multispecies detection. The high spatial coherence of the MIR SC source provides long interaction path lengths, thereby increasing the sensitivity for molecular species. The combination of such a SC source with a custom-built FTIR spectrometer (0.1 cm(-1) spectral resolution) allows detection of various gases with high spectral resolution. We demonstrate its potential in plasma applications by accurate identification and quantification of a variety of reaction products (e.g. nitrogen oxides and carbon oxides) under low-pressure conditions, including the molecular species with overlapping absorbance features (e.g. acetone, acetaldehyde, formaldehyde, etc.).
Original languageEnglish
Article number9642
Number of pages11
JournalScientific Reports
Volume12
Issue number1
DOIs
Publication statusPublished - 10 Jun 2022

Keywords

  • LASER-ABSORPTION-SPECTROSCOPY
  • PRESSURE GLOW-DISCHARGE
  • CARBON-DIOXIDE
  • MU-M
  • CO2 HYDROGENATION
  • SYNGAS PRODUCTION
  • GENERATION
  • METHANE
  • TECHNOLOGY
  • CONVERSION

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