Mid-infrared Broadband Spectroscopy for Plasma Analysis

R. Krebbers; N. Liu; K. E. Jahromi; M. Nematollahi; O. Bang; G. Woyessa; C. R. Petersen; G. van Rooij; F. J.M. Harren; A. Khodabakhsh; S. M. Cristescu

Mid-infrared Broadband Spectroscopy for Plasma Analysis

R. Krebbers, N. Liu, K. E. Jahromi, M. Nematollahi, O. Bang, G. Woyessa, C. R. Petersen, G. van Rooij, F. J.M. Harren, A. Khodabakhsh, S. M. Cristescu

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Abstract

We demonstrate the application of a home-built Fourier Transform Spectrometer based on a mid-infrared supercontinuum source for multispecies detection in a plasma reactor. The results show the high capability of the system for plasma analysis.

Original language	English
Title of host publication	Optics and Photonics for Sensing the Environment
Edition	182856
Publication status	Published - 1 Jan 2022
Event	Optics and Photonics for Sensing the Environment 2022 - Hyatt Regency Vancouver, Vancouver, Canada Duration: 11 Jul 2022 → 15 Jul 2022 https://www.optica.org/events/meeting_archives/2022/optics_and_photonics_for_sensing_the_environment/

Publication series

Series	Optics InfoBase Conference Papers

Conference

Conference	Optics and Photonics for Sensing the Environment 2022
Abbreviated title	ES 2022
Country/Territory	Canada
City	Vancouver
Period	11/07/22 → 15/07/22
Internet address	https://www.optica.org/events/meeting_archives/2022/optics_and_photonics_for_sensing_the_environment/

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@inproceedings{fdd43270b6a745cea456fe6182a6c84a,

title = "Mid-infrared Broadband Spectroscopy for Plasma Analysis",

abstract = "We demonstrate the application of a home-built Fourier Transform Spectrometer based on a mid-infrared supercontinuum source for multispecies detection in a plasma reactor. The results show the high capability of the system for plasma analysis.",

author = "R. Krebbers and N. Liu and Jahromi, {K. E.} and M. Nematollahi and O. Bang and G. Woyessa and Petersen, {C. R.} and {van Rooij}, G. and Harren, {F. J.M.} and A. Khodabakhsh and Cristescu, {S. M.}",

note = "Publisher Copyright: {\textcopyright} 2022 The Author(s); Optics and Photonics for Sensing the Environment 2022, ES 2022 ; Conference date: 11-07-2022 Through 15-07-2022",

year = "2022",

month = jan,

day = "1",

language = "English",

series = "Optics InfoBase Conference Papers",

booktitle = "Optics and Photonics for Sensing the Environment",

edition = "182856",

url = "https://www.optica.org/events/meeting_archives/2022/optics_and_photonics_for_sensing_the_environment/",

}

Krebbers, R, Liu, N, Jahromi, KE, Nematollahi, M, Bang, O, Woyessa, G, Petersen, CR, van Rooij, G, Harren, FJM, Khodabakhsh, A & Cristescu, SM 2022, Mid-infrared Broadband Spectroscopy for Plasma Analysis. in Optics and Photonics for Sensing the Environment. 182856 edn, ETu4H.4, Optics InfoBase Conference Papers, Optics and Photonics for Sensing the Environment 2022, Vancouver, British Columbia, Canada, 11/07/22.

TY - GEN

T1 - Mid-infrared Broadband Spectroscopy for Plasma Analysis

AU - Krebbers, R.

AU - Liu, N.

AU - Jahromi, K. E.

AU - Nematollahi, M.

AU - Bang, O.

AU - Woyessa, G.

AU - Petersen, C. R.

AU - van Rooij, G.

AU - Harren, F. J.M.

AU - Khodabakhsh, A.

AU - Cristescu, S. M.

PY - 2022/1/1

Y1 - 2022/1/1

N2 - We demonstrate the application of a home-built Fourier Transform Spectrometer based on a mid-infrared supercontinuum source for multispecies detection in a plasma reactor. The results show the high capability of the system for plasma analysis.

AB - We demonstrate the application of a home-built Fourier Transform Spectrometer based on a mid-infrared supercontinuum source for multispecies detection in a plasma reactor. The results show the high capability of the system for plasma analysis.

M3 - Conference article in proceeding

T3 - Optics InfoBase Conference Papers

BT - Optics and Photonics for Sensing the Environment

T2 - Optics and Photonics for Sensing the Environment 2022

Y2 - 11 July 2022 through 15 July 2022

ER -

Mid-infrared Broadband Spectroscopy for Plasma Analysis

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