Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers

Rozita Rouzbahani, Shannon S. Nicley, Danny E. P. Vanpoucke, Fernando Lloret, Paulius Pobedinskas, Daniel Araujo, Ken Haenen

Research output: Contribution to journalArticleAcademicpeer-review

Original languageEnglish
Pages (from-to)463-473
Number of pages11
JournalCarbon
Volume172
DOIs
Publication statusPublished - Feb 2021
Externally publishedYes

Keywords

  • Impurity incorporation
  • Methane concentration dependence
  • DFT calculation
  • CVD growth
  • Boron-doped single crystal diamond
  • CHEMICAL-VAPOR-DEPOSITION
  • ELECTRICAL CHARACTERIZATION
  • ELECTRONIC-PROPERTIES
  • RAMAN-SPECTRA
  • GROWTH-RATE
  • THIN-FILMS
  • CONDUCTIVITY
  • TEMPERATURE
  • SUBSTRATE
  • MECHANISM

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