Energy partitioning in N-2 microwave discharges: integrated Fokker-Planck approach to vibrational kinetics and comparison with experiments

M. Altin, P. Viegas, L. Vialetto, A.W. van de Steeg, S. Longo, G.J. van Rooij, P. Diomede*

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

Abstract

This work investigates energy transfers between electrons, vibrational and translational degrees of freedom and their effect on dissociation mechanisms in a N-2 microwave plasma in the pressure range between 50 and 400 mbar. A novel self-consistent 0D plasma chemistry model describing vibrational kinetics via the vibrational energy equation and the Fokker-Planck approach is developed. It is used to simulate conditions achieved experimentally, providing good agreement with measured values of vibrational and gas temperature and electron density. Above 100 mbar, energy efficiency of dissociation increases with power density, due to the significant contribution of collisions between vibrationally excited N-2 and electronically excited molecules. Energy transfer to vibrations is maximum at low power density and low pressure due to reduced gas heating.
Original languageEnglish
Article number104003
Number of pages18
JournalPlasma Sources Science & Technology
Volume31
Issue number10
DOIs
Publication statusPublished - 1 Oct 2022

Keywords

  • microwave discharges
  • nitrogen
  • comparison of simulations with experiments
  • energy partitioning
  • Fokker-Planck approach to vibrational kinetics
  • RATE COEFFICIENTS
  • TRANSFER RATES
  • LOW-PRESSURE
  • NITROGEN
  • DISSOCIATION
  • PLASMA
  • SCATTERING
  • ATOMS
  • N2

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